SiC ring

Product	SiC ring
Material	Silicon carbide
Processing Method	CNC machining
Size	O.D.Φ50 x I.D.Φ40 x 5 mm(T)
Application	Silicon carbide ring used as a chamber component.
Description	SiC ring is used in plasma-enhanced CVD chambers. Silicon carbide has the properties such as high plasma and heat resistance.

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