SiC susceptor
Product | SiC susceptor |
---|---|
Material | Silicon carbide |
Processing Method | Embossing |
Size | embossment of Φ1.0 x 0.5 mm |
Application | Used for semiconductor manufacturing devices |
Description | A susceptor made of silicon carbide is used to heat and hold wafers. Embossment of φ1.0 X 0.5 mm(H) is processed on the SiC susceptor. Silicon carbide has excellent heat conductivity and is a popular material for heater related components. |