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Aluminum nitride product / Clamp ring
| Product | Clamp ring |
|---|---|
| Material | Aluminum Nitride |
| Processing Method | CNC machining |
| Size | O.D.Φ350 x I.D.Φ300 x 2 mm (T) |
| Application | Used in semiconductor-manufacturing machines. |
| Description | A clamp ring used to hold or handle the silicon wafer. ALN thermal conductivity 90w/mk, 170w/mk, 200w/mk or 230w/mk would be available. |
